Henke Atomic Scattering Factors
 
Center for X-Ray Lithography, Univ. of Wisconsin
Quotation from that site:

Files of the type (1) and (2) are briefly described below, since they will be needed for the examples in Chapter 6.
They both utilize the optical constant library based on B.Henke and G.Tirsell data for the energy range 10-10,000 eV and on Cromer compilation for the range 10,000-100,000 eV. For case (5) see the example supplied in the DEMO section.

         Atomic scattering factors for the elements
         at Uppsala Univsersity in Sweden, as published by B. L. Henke, E. M. Gullikson, and J. C. Davis, in Atomic
         Data and Nuclear Data Tables, Vol. 54, No. 2 (1993).

         URL    http://xray.uu.se/hypertext/ptable.html
 
1998 reference
Magnetic properties of transition-metal multilayers studied with X-ray magnetic circular dichroism spectroscopy
by J. Stohr and R. Nakajima .almaden.ibm.com/journal/rd/421/stohr.txt
Reference to

27. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data
Tables 54, 181 (1993).

B.L.Henke, E.M.Gullikson, and J.C.Davis, Atomic Data and Nuclear Data Tables Vol. 54 No. 2 (1993) 181-342.

Books
   1.D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University
     Press, summer 1999)
   2.F. Zernike and D. Attwood, Editors, EUV Lithography (OSA, Washington D.C., 1995)
   3.D. Attwood and J. Bokor, Editors, Short Wavelength Coherent Radiation (Amer. Instit. Physics, N.Y., 1986)
   4.D. Attwood and B. Henke, Editors, Low Energy X-ray Diagnostics (Amer. Instit. Phys, N.Y., 1981)

116 B. L. Henke, Phys. Rev., A6 (1), 94, (1972).
117 B. Henke, P. Lee, J. Tanaka, R. Shimabukuro und B. Fujikawa, At. Data Nucl. Data Tables, 27 (1), 1, (1982).

The program HENKE deals with the data set on soft x-ray optical
constants.  The program runs on VAX/VMS, MS-DOS (Turbo C 2.0),
and AIX (and probably any Unix) (see the file "henke.txt").
There's also a version which runs in IDL, a software package from
Research Systems Inc., in Boulder, Colorado (see "henke_idl.txt").
Earlier versions of the data set were compiled by Burton Henke
and his students and collaborators at the University of Hawaii,
and more recently by Eric Gullikson and collaborators at the
Center for X-ray Optics, Lawrence Berkeley Laboratory. This
program currently makes use of the 1993 data set for all 92
natural elements at energies ranging from 10 to 30,000 eV.

   1.B. L. Henke, E. M. Gullikson, and J. C. Davis, ``X-ray Interactions: Photoabsorption, Scattering, Transmission, and
     Reflection at E=50-30,000 eV, Z=1-92,'' Atomic Data and Nuclear Data Tables 54, 181-342 (1993).
   2.B. L. Henke, ``Low energy x-ray interactions: photoionization, scattering, specular and Bragg reflection,'' in D. T.
     Attwood and B. L. Henke, eds., Low Energy X-ray Diagnostics (American Institute of Physics Conf. Proc. 75, New
     York, 1981), pp. 146-155.

CUBIC: Preflight Calibration Status
Includes a link to References page which inludes this:

11] B.L. Henke, P.Lee, T.J. Tanaka, R.L. Shimabukuro, and B.K. Fujikawa, Atomic Data and Nuclear
Data Tables, 27 (1982) 1.

     B.L. Henke, E.M. Gullikson, and J.C. Davis. X-ray interactions: photoabsorption, scattering, transmission,
     and reflection at E=50-30000 eV, Z=1-92, Atomic Data and Nuclear Data Tables, July 1993, 54,
     (no.2):181-342.

Empirical Mass Absorption Coefficients
A variety of date are included, taken from

B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro and B. K. Fijikawa, Atomic Data Nucl. Data Tables 27, 1 (1982)
B. L. Henke and E. S. Ebisu, Adv. X-Ray Anal. 17, 150 (1974)

The IAEA Nuclear Data Guide has a link to Photo-Atomic Interaction Data
This includes a reference to
X-ray interactions

Photoabsorption, scattering, transmission, and reflection of x-rays in the energy-range 50 eV - 30 keV for
all elements Z = 1-92. A data handbook with a textbook-similar introduction by B.L. Henke,
E.M. Gullikson, J.C. Davis, Berkeley, published as vol. 54/2 of the journal Atomic Data and Nuclear
Data Tables (1993).

Heinrich, Henke and/or Empirical Mass Absorption Coefficients

X-ray interactions
Photoabsorption, scattering, transmission, and reflection of x-rays in the energy-range 50 eV - 30
keV for all elements Z = 1-92. A data handbook with a textbook-similar introduction by B.L.
Henke, E.M. Gullikson, J.C. Davis, Berkeley, published as vol. 54/2 of the journal Atomic Data
and Nuclear Data Tables (1993).
 

     (PCP-25) A.M. Hawryluk, N.M. Ceglio, R.H. Price, J. Melngailis, and H.I. Smith, "Soft X-ray Spectroscopy using
     Thick Gold Transmission Gratings of 0.2 to 0.32 µm Spatial Periods", pp. 286-289, Proc. Topical Conference on Low
     Energy X-ray Diagnostics, Monterey, CA, June 8-10, 1981. Eds. D.T. Atwood and B.L. Henke, Amer. Inst. of Physics
     Conference Proc. No. 75, New York, NY (1981).

Electron Cloud in the LHC
Reference to

     B.L. Henke, E.M. Gullikson, and J.C. Davis, X-ray interactions: photoabsorption, scattering, transmission, and
     reflection at E=50-30000 eV, Z=1-92, Atomic Data and Nuclear Data Tables 54, 181-342 (1993). Most of this data
     is presented in interactive form in the World-wide web page on X-ray Interactions with Matter, published by the
     LBNL X-ray laboratory.
 

AMOCO_6mTGM_paper
Reference to

14. B.L. Henke, J.P.Knauer and K. Premaratne, J. Appl. Phys. 52, 302 (1981)

 25.B.L. Henke, J.P. Knauer, and K. Premaratne. J.Appl.Phys., 52 (1981) 1509.

Henke, B.L., Lee, P., Tanaka, T.J., Shimabukuro, R.L., and Fujikawa, B.K., 1981, in: D.T. Attwood and B.L. Henke (Eds.), 'Low Energy X-ray Diagnostics', AIP Conference Proceedings No. 75 (AIP, New York).
Also posted here.

28 B. L. Henke, E. M. Gullikson, J. C. Davis, Atomic Data and Nuclear Data Tables, 54, pp. 181-342 (1993).

7. B. L. Henke, E.M. Gullikson, and J.C. Davis, At. Data Nucl. Data Tables 54, 181 (1993)

B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro and B. K. Fijikawa, Atomic Data Nucl. Data Tables 27, 1 (1982)

          X-ray Interactions with Matter
          Compiled by B. L. Henke, E. M. Gullikson, and J. C. Davis (Atomic Data and Nuclear Data Tables 54
          No. 2 (July 1993)). Atomic scattering factor files includes data about elements which have been updated
          since the publication of the tables in July 1993.

IMD V4.0
Includes this reference:

12.B. L. Henke, E. M. Gullikson, and J. C. Davis, 'X-ray interactions: photabsorption, scattering, transmission, and
 reflection at E-50-30,000 eV, Z=1-92', Atomic Data and Nuclear Tables, 54 (1993). In addition to the data contained
 therin, the Center for X-Ray Optics (CXRO), Lawrence Berkeley Laboratory, maintains an active database of atomic
scattering factors; these data are available at <http://www-cxro.lbl.gov>, and have been included in IMD, courtesy of E.M. Gullikson.

LUNAR RESOURCE ASSESSMENT TECHNOLOGIES WORKSHOP April 6-7, 1992
Reference to

[4] B. L. Henke et al. (1982) Atomic Data and Nuclear Data Tables, 27, 1.